◊ Irradiation Facilities for Semiconductor
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10MeV 10kW Accelerator 1 unit
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2.5MeV 100kW Accelerator, 2 units
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Clean Room(class 10000)
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Cooling system
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Dosimetry laboratory
◊ Why Choose EBTECH?
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Possible to irradiation for all type packages
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Offering Total service for electron beam irradiation equipment
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Clean room for wafer handling
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Test against irradiation side effects
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In-house equipment maintenance
@Key points in Quality Contol
◊ Working Flow