◊ Irradiation Facilities for Semiconductor

  • 10MeV 10kW Accelerator 1 unit

  • 2.5MeV 100kW Accelerator, 2 units

  • Clean Room(class 10000)

  • Cooling system

  • Dosimetry laboratory

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◊ Why Choose EBTECH?

  • Possible to irradiation for all type packages

  • Offering Total service for electron beam irradiation equipment

  • Clean room for wafer handling

  • Test against irradiation side effects

  • In-house equipment maintenance

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@Key points in Quality Contol

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◊ Working Flow

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